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Product Category
Burr-Free · Ra 0.8 · UV Particle-Free · Cleanroom
CIC / 001 — 010

Particle-Free Process
Chamber Internal Components

Ultra-clean CNC machined vacuum chamber internal components — shields, baffles, diffusers, and mounting structures. Burr-free deburring verified at 10× magnification, Ra 0.8 µm or better, zero loose particles after ultrasonic cleaning and UV inspection. Al 6061 hard-anodized or SUS316L electropolished for plasma process, CVD, etch, and deposition chamber interiors.

Burr-Free
All Edges
Ra 0.8µm
Process Surface
Cleanroom
ISO Class 5
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PART DWG · CIC-000 BAFFLE · Al 6061 HA · WALL 1.5 · BURR-FREE ISO 9001 · UV · CMM
Burr-Free · UV
Wall ≥1.0 · Ra 0.8
BAFFLE · X-SEC · PROCESS CHAMBER Al 6061 HA · Ø180 · 24 GAS HOLES · WALL 1.5 · Ra 0.8 1.5 ±0.05 phantom plasma cloud GAS DIFFUSION HOLES · BURR-FREE Ra 0.8 burr-free R0.2 phantom Ø300 wafer UV PARTICLE INSPECTION · ZERO LOOSE WALL · MATERIAL Al 6061 HA ◀≥1.0 mm SUS316L EP≥1.2 mm PEEK≥1.5 mm SUS304≥1.0 mm PARTICLE · CLASS UV inspect ◀zero loose ISO Class 5cleanroom pack ISO Class 7semi spec CO₂ snow + IPA US COMPONENT · TYPE SHIELD ◀ BAFFLE DIFFUSER LINER MATCHED KITS SUPPLIED SHIELD + BAFFLE + BRACKET MATERIAL · USE Al 6061 HA ◀shield / liner SUS316L EPgas-wetted SUS304general clean PEEKelectrically isolated Al 7075 HAlight + stiff SCALE 1:1 · MM
Semi · Vacuum · Optics · Research · Medical
Applications
Al 6061 HA · SUS316L EP · PEEK · Al 7075
Materials
48hr Quote · 7-Day Proto
Service
Burr-Free
All Edges
verified under 10× mag
Ra 0.8µm
Internal Surfaces
process environment grade
Cleanroom
Packaging
ISO Class 5 standard
7 Days
Fastest Delivery
prototype orders
Machining Challenges

Chamber Internal Component Challenges

Internal components are in direct contact with the process environment — any loose particle, burr, or surface contamination can directly contaminate wafers or affect process chemistry.

✂️
Burr-Free Deburring
Every internal edge must be deburred to a defined radius with zero loose particles. HXC uses precision deburring tools, CO₂ snow cleaning, and 10× magnification inspection of every edge before ultrasonic cleaning.
⚖️
Thin-Wall Distortion Control
Internal shields and baffles often have walls 1–3 mm thick. HXC uses dedicated fixturing and sequential light cuts to prevent vibration and distortion. Wall thickness verified by CMM and ultrasonic gauge.
🔬
Cleanroom Compatibility
Internal components require materials that do not outgas or shed particles in vacuum. Only cleanroom-compatible cutting fluids used. Post-machining cleaning verified by particle count and UV inspection.
Our Work

Chamber Internal Components We've Made

Real CNC machined semiconductor components — cleaned, inspected, cleanroom-packaged.

Request Similar Part →
Process Chamber Plasma ShieldAl 6061 · Shield
Plasma Shield
Ano · Burr-free · 10 pcs
Chamber Baffle — ElectropolishedSUS316L · Baffle
Chamber Baffle
Ra 0.8µm EP · 8 pcs
Internal Support BracketAl 6061 · Bracket
Support Bracket
Thin-wall · 15 pcs
Gas Diffuser PlateSUS316L · Diffuser
Gas Diffuser Plate
Precision holes · 6 pcs
Chamber Liner InsertAl 6061 · Liner
Chamber Liner
Protective · 12 pcs
Focus RingSUS316L · Ring
Focus Ring
Uniform · 8 pcs
Sensor MountAl 7075 · Mount
Sensor Mount
Lightweight · 20 pcs
Internal BatchSUS316L · Batch
Internal Components Batch
15 pcs · Particle-verified
Capabilities & Tolerances

What We Can Deliver

Typical specifications — confirm exact requirements at enquiry.

Deburring standardBurr-free, 10× mag verified
Internal Ra0.8 µm std (0.4 µm avail)
Particle cleanlinessUV inspect, zero loose
Thin wall min1.0 mm Al / 1.2 mm SUS
CMM inspectionAll critical dimensions
PackagingISO Class 5, N₂ purge
MaterialsAl 6061/7075, SUS316L, PEEK
DeburringTool + CO₂ snow + US
CleaningIPA US + N₂ dry + UV
Lead time (proto)7–10 days
Lead time (batch)12–18 days
Thin-wall DFMIncluded in quote
How It Works

From Drawing to Cleanroom-Ready Part

Upload your drawing — DFM review, machining, cleaning, inspection, cleanroom packaging.

01
Upload Drawing
STEP, DXF, PDF. Include material, tolerance, cleanliness class.
02
DFM & Quote
Free DFM — thin walls, deburring strategy, finish. Quote in 48 h.
03
Machine, Clean & Inspect
CNC, ultrasonic clean, CMM + UV particle, cleanroom pack.
04
Ship Worldwide
Full dimensional + cleaning record. DHL / FedEx / sea freight.
Reviews

Trusted by Semiconductor Equipment Engineers

★★★★★
"Surface cleanliness and packaging met our cleanroom incoming inspection immediately. UV particle inspection certificate matched our internal QC."
LW
Li Wei
Process Equipment Engineer · Taiwan
★★★★★
"HXC understood the burr-free requirement for our plasma shields immediately. 10× edge inspection found zero loose burrs on first article."
SL
Sophie L.
Equipment Design Engineer · South Korea
★★★★★
"Two years of wafer handling and chamber parts. Cleanliness, dimensional accuracy, and batch consistency are excellent."
JT
James T.
Senior Procurement · USA
FAQ

Chamber Internal Components — FAQ

Engineering and procurement questions answered by our semiconductor components team.

Three-stage particle control: (1) Precision deburring — all edges deburred to a defined radius using calibrated tools; (2) CO₂ snow cleaning — kinetic particle removal without liquid contamination; (3) Ultrasonic IPA cleaning + 10× UV lamp inspection — zero detectable particles. Particle count certificate available.
Yes: Al 6061 walls ≥ 1.0 mm and SUS316L walls ≥ 1.2 mm achievable using: (1) soft-jaw or expanding mandrel fixturing; (2) sequential light finishing cuts; (3) air cooling only (no coolant pressure deforming thin walls). Wall thickness verified by CMM and calibrated ultrasonic gauge.
Al 6061 hard-anodized: standard for shields, liners, mounting — lightweight, good thermal conductivity. SUS316L electropolished: gas-wetted components — low outgassing, particle-resistant smooth surface. PEEK: electrically isolated components or where metal contamination must be eliminated.
Yes — HXC regularly supplies matched internal component kits: shield + baffle + support bracket verified dimensionally as a set. Assembly compatibility checked by CMM before shipment. All components in a kit share the same batch number for traceability.
Plasma-facing (shields, liners): Ra 0.8 µm, hard-anodized Al or electropolished SUS316L. Gas-wetted (baffles, diffusers): Ra 0.4 µm, electropolished SUS316L. Mounting and structural: Ra 1.6 µm standard. Verified by profilometer.
Maximum single component: 500 × 300 × 150 mm. Minimum feature size: 1.0 mm wall, 0.5 mm slot width. For complex internal components with multiple thin-wall zones, DFM review identifies critical sections and recommends minimum dimensions.
Prototype: 7–10 days. Batch: 12–18 days. Large complex internal assemblies: 14–22 days.
Get a Quote

Send Your Drawing.
Get a Quote.

Every enquiry includes a DFM review — tolerance feasibility, material confirmation, and process approach confirmed before production starts. MOQ 1 piece.

24hr
Quote Response
MOQ 1
Prototypes OK
ISO
9001:2015
📐
DFM Review on Every Enquiry
Tolerance feasibility, fixturing strategy, and material confirmation. Specific, actionable feedback — not generic pushback.
🎯
First Article Inspection — Standard
FAI report on every new run. Material certs and surface treatment certs included with every shipment.
🔄
Same Process: Prototype to Production
Process plan from your prototype applies to production batches. No re-qualification when you scale.
⚙
3 / 4 / 5-Axis CNC + Turning
Complex structural parts, shafts, housings, and transmission components. Metals and engineering plastics.
ISO 9001:2015 3/4/5-Axis Milling CNC Turning CMM Inspection Global Delivery