Product Category
<1×10⁻⁹ · EP Ra 0.4µm · O-Ring ±0.02 · Bakeable
VMF / 001 — 008
CNC Machined
Vacuum Manifolds
Precision CNC machined vacuum manifolds — ultra-clean electropolished internal surfaces, O-ring groove dimensions to seal manufacturer specification, leak rate <1×10⁻⁹ mbar·l/s. SUS316L or Al 6061 for semiconductor, laboratory, and research vacuum systems.
<10⁻⁹
He Leak
Ra 0.4µm
EP Internal
KF/CF/VCR
Standards
PART DWG · VMF-000 6-PORT MANIFOLD · SUS316L EP
ISO 9001 · BAKEABLE 300°C
Electropolished EP
6 KF/CF Ports
Semi · Research · UHV · Optical · Med · Cryo
Use Cases
SUS316L EP · 304 · Al 6061 · Al 6082
Materials
48hr Quote · 7-Day Proto
Service
<1×10⁻⁹
Leak Rate
mbar·l/s helium test
mbar·l/s helium test
Ra 0.4µm
Internal Surface
electropolished
electropolished
KF/CF/VCR
Flange Standards
supported
supported
7 Days
Fastest Delivery
prototype orders
prototype orders
Machining Challenges
Vacuum Manifold Machining Challenges
A vacuum manifold must achieve leak rates undetectable by standard pressure testing — requiring electropolished surfaces, precision O-ring grooves, and a cleanroom-compatible manufacturing process.
💨
Ultra-Low Leak Rate
Vacuum manifolds for semiconductor or research applications require leak rates <1×10⁻⁹ mbar·l/s. This demands defect-free sealing surfaces, precise O-ring groove geometry, and helium leak testing — not just pneumatic pressure testing.
🧼
Surface Cleanliness & Outgassing
Internal surfaces must be free of machining residues, oils, and micro-roughness that outgas in high vacuum. HXC electropolishes internal surfaces and ultrasonically cleans in IPA before cleanroom packaging.
⊕
Flange & Port Interface Accuracy
KF, CF, and VCR interface dimensions are standardised — any deviation causes flange face misalignment and leaks at the knife-edge seal. HXC machines all vacuum flange faces to ISO/PNEUROP standards and verifies by CMM.
Our Work
Request Similar Part →
Vacuum Manifolds We've Made
High-vacuum manifolds for semiconductor, research, and laboratory systems — helium leak tested.
Capabilities & Tolerances
What We Can Deliver
Typical specifications for this product type. Confirm exact requirements at enquiry.
| Leak rate standard | <1×10⁻⁹ mbar·l/s |
| Internal Ra | 0.4 µm (electropolished) |
| Flange standards | KF (ISO), CF (ConFlat), VCR, ISO-K |
| O-ring groove tolerance | ±0.02 mm depth/width |
| Cleaning | IPA ultrasonic + cleanroom pack |
| Helium leak test | Standard on all vacuum manifolds |
| Materials | SUS316L, Al 6061, Al 6082 |
| Electropolish | Internal surfaces standard |
| Certification | Helium leak test certificate |
| Lead time (proto) | 7–10 days |
| Lead time (batch) | 12–18 days |
| Packaging | Cleanroom bag, double-sealed |
How It Works
From Drawing to Finished Part
Upload your drawing — DFM review, machining, pressure/leak test if required, and shipping within agreed lead time.
01
Upload Drawing
STEP, DXF, PDF. Include channel specs, thread standards, and sealing requirements.
02
DFM & Quote
Free DFM review — channel access, deburring feasibility, sealing surface strategy. Quote in 48 h.
03
Machine & Test
CNC machining, deburring, cleaning, CMM inspection, pressure/leak test as specified.
04
Ship Worldwide
Inspection report + test records enclosed. DHL / FedEx / sea freight.
Reviews
Trusted by Engineers Worldwide
★★★★★
"Deep cross-drilled channels were deburred perfectly — zero burrs found at our incoming inspection. Leak test passed first time. Delivery exactly on schedule."
MK
Martin K.
Hydraulic Systems Engineer · Germany
★★★★★
"We source precision valve bodies and manifold blocks from HXC. Bore coaxiality is consistently within 0.005 mm, sealing surface Ra verified on every batch."
SL
Sophie L.
Procurement Manager · France
★★★★★
"HXC understood the cleanliness requirements for our semiconductor gas distribution plates immediately. Documentation package was complete and traceable."
JT
James T.
Process Engineer · Taiwan
FAQ
Frequently Asked Questions About Vacuum Manifold Machining
Engineering and procurement questions answered by our team.
Standard: <1×10⁻⁹ mbar·l/s (helium leak test). For UHV applications: <1×10⁻¹⁰ mbar·l/s with additional surface treatment and knife-edge CF flanges. Every vacuum manifold HXC produces is helium leak tested and a test certificate with date, instrument calibration reference, and measured leak rate is provided.
HXC machines all standard vacuum interface flanges: KF (Klein Flange, ISO 2861) — Ø10 to Ø160 mm; CF (ConFlat, ANSI/BSR) — knife-edge sealing for UHV; ISO-K / ISO-F — large-diameter vacuum; VCR — high-purity gas and vacuum tubing fittings. All flange face dimensions are machined to ISO/PNEUROP standard and verified by CMM.
HXC electropolishes all internal surfaces of vacuum manifolds: Ra 0.4 µm after electropolishing (vs Ra 0.8–1.6 µm machined). Electropolishing removes surface asperities and chromium-depleted layer, reducing outgassing rate by 5–10× compared to machined-only surfaces. Essential for systems where base pressure below 10⁻⁷ mbar is required.
(1) Degreasing and machining residue removal; (2) Ultrasonic cleaning in IPA; (3) Nitrogen blow-dry; (4) Visual inspection under UV light for residual contamination; (5) Double-sealed cleanroom packaging in ISO Class 5 bag. Particle count report available on request for semiconductor-grade manifolds.
O-ring groove dimensions for CF and KF flanges follow AS568 / BS1806 standard grove geometry. Critical tolerances: groove width ±0.02 mm; groove depth ±0.02 mm; groove centreline position ±0.05 mm relative to flange face. These tolerances ensure the O-ring is compressed to the correct percentage for leak-free sealing. All groove dimensions are CMM-verified.
Yes — for UHV applications (base pressure <10⁻⁹ mbar): (1) CF ConFlat flanges with knife-edge sealing (copper or gold-coated gasket); (2) electropolished interior Ra 0.4 µm; (3) UHV-compatible materials (SUS316L, non-magnetic grades on request); (4) bake-out capable — machined from 316L with no trapped volumes. Helium leak test to <1×10⁻¹⁰ mbar·l/s available.
SUS316L: standard for high and ultra-high vacuum — low outgassing, electropolishable, non-magnetic (standard grade). Al 6061/6082: for lower-vacuum systems (< 10⁻⁶ mbar) where weight matters — KF flanges, hard anodized. SUS304: for medium vacuum and clean process systems. Material mill certificates and RoHS compliance provided.
Prototype: 7–10 days (includes electropolish + helium leak test). Small batch (5–20 pcs): 12–18 days. Production: 16–24 days. UHV ConFlat manifolds: add 2–3 days.
Get a Quote
Send Your Drawing.
Get a Quote.
Every enquiry includes a DFM review — tolerance feasibility, material confirmation, and process approach confirmed before production starts. MOQ 1 piece.
24hr
Quote Response
MOQ 1
Prototypes OK
ISO
9001:2015
📐
DFM Review on Every Enquiry
Tolerance feasibility, fixturing strategy, and material confirmation. Specific, actionable feedback — not generic pushback.
🎯
First Article Inspection — Standard
FAI report on every new run. Material certs and surface treatment certs included with every shipment.
🔄
Same Process: Prototype to Production
Process plan from your prototype applies to production batches. No re-qualification when you scale.
⚙
3 / 4 / 5-Axis CNC + Turning
Complex structural parts, shafts, housings, and transmission components. Metals and engineering plastics.
ISO 9001:2015
3/4/5-Axis Milling
CNC Turning
CMM Inspection
Global Delivery