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Product Category
CF / KF / ISO-K · <1×10⁻⁹ · ≤0.005mm · He-Test
VFF / 001 — 008

Precision CNC
Vacuum Flange Fittings

Precision CNC machined vacuum flange fittings and adapters — CF / KF / ISO-K interface dimensions to standard, flange face flatness ≤ 0.005 mm, concentricity ≤ 0.005 mm, helium leak test <1×10⁻⁹ mbar·l/s. SUS316L or Al 6061 for semiconductor, research, and industrial vacuum systems.

<10⁻⁹
He Leak
≤0.005mm
Face Flat
CF/KF/ISO
Standards
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PART DWG · VFF-000 CF KNIFE-EDGE FLANGE · SUS316L EP ISO 9001 · DIN 28403
Cu Gasket Above
Knife-Edge 23°
Cu OFHC GASKET 23° ±0.5° tip R ≤ 0.1 Ø BORE ⊙ ⌀0.005 A ⏥ 0.005 CF SECT · 23° KNIFE · <10⁻¹⁰ mbar·l/s HALF-SECT · CF ConFlat · 2:1 FLANGE · STANDARDS TYPE SEAL VACUUM CF ◀ Cu/Au UHV <10⁻¹⁰ KF (ISO) Viton O HV <10⁻⁸ ISO-K/F O-ring MV <10⁻⁷ VCR metal gas line KNIFE-EDGE · PROFILE tip R ≤ 0.1 23° ± 0.5° PROFILOMETER 4 angular pos. per DIN 28403 ✓ angle ✓ tip R 100% He LEAK TEST FIT PRESS He MS PROBE CERT FIT · blank flange + Cu PRESS · He from outside MASS-SPEC vacuum side CERT · <10⁻⁹ mbar·l/s 100% TESTED MATERIAL · VACUUM CLASS MATERIAL BAKE °C USE SUS316L EP ◀ 300 UHV CF SUS304 250 HV Al 6061 HA 150 KF · MV Ti Grade 5 350 aero / non-mag OFHC Cu — gasket only SCALE 2 : 1 · MM
Semi · Research · Optical · Med · Industry
Use Cases
SUS316L · 304 · Al 6061 · Ti · OFHC Cu
Materials
48hr Quote · 6-Day Proto
Service
<1×10⁻⁹
Leak Rate
mbar·l/s
≤0.005mm
Flange Face Flatness
sealing surface grade
CF/KF/ISO
All Standards
supported
6 Days
Fastest Delivery
prototype orders
Machining Challenges

Vacuum Flange Fitting Challenges

Vacuum flange fittings are the connection points of a vacuum system — any dimensional deviation from standard causes misalignment, flange face damage, and leaks at the system level.

⦿
Bore-to-Flange Concentricity
The bore must be concentric with the flange face and bolt circle to ≤ 0.005 mm — any eccentricity causes the flange to seat off-centre, distorting the gasket contact and creating leak paths.
📐
Knife-Edge Geometry (CF Flanges)
CF ConFlat flanges have a precision knife-edge that cuts into a copper or aluminium gasket to form a hermetic seal. The knife-edge angle, tip radius (≤ R0.1 mm), and height must be within PNEUROP tolerance. Verified by contact profilometer.
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Helium Leak Integrity
Every vacuum flange fitting must seal to <1×10⁻⁹ mbar·l/s when assembled against its mating flange. HXC helium-tests all vacuum-rated fittings and provides a leak test certificate.
Our Work

Vacuum Flange Fittings We've Made

Real CNC machined semiconductor components — cleaned, inspected, and cleanroom-packaged.

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Capabilities & Tolerances

What We Can Deliver

Typical specifications — confirm exact requirements at enquiry.

Leak rate<1×10⁻⁹ mbar·l/s (He test)
CF knife-edgePNEUROP standard, tip R ≤ 0.1 mm
Flange face flatness≤ 0.005 mm
Bore/flange concentricity≤ 0.005 mm
Flange standardsCF, KF, ISO-K/F, VCR
CleaningIPA ultrasonic + N₂ + cleanroom pack
MaterialsSUS316L, Al 6061, Ti Grade 5
Helium test100% every fitting, certificate
Surface treatmentElectropolish, passivation, hard anodize
Lead time (proto)6–9 days
Lead time (batch)10–16 days
Non-standardAny adapter geometry available
How It Works

From Drawing to Cleanroom-Ready Part

Upload your drawing — DFM review, machining, cleaning, inspection, and cleanroom packaging within agreed lead time.

01
Upload Drawing
STEP, DXF, PDF. Include material, tolerance, and cleanliness class.
02
DFM & Quote
Free DFM review — sealing face feasibility, thin walls, deburring strategy. Quote in 48 h.
03
Machine, Clean & Inspect
CNC machining, ultrasonic clean, CMM inspection, cleanroom packaging.
04
Ship Worldwide
Full dimensional report + cleaning record enclosed. DHL / FedEx / sea freight.
Reviews

Trusted by Semiconductor Equipment Engineers

★★★★★
"Surface cleanliness and packaging met our cleanroom incoming inspection requirements immediately. Dimensional report matched our CMM check perfectly."
LW
Li Wei
Process Equipment Engineer · Taiwan
★★★★★
"HXC understood the vacuum sealing requirements for our chamber components without lengthy explanation. Lead time was exactly as quoted."
SL
Sophie L.
Equipment Design Engineer · South Korea
★★★★★
"We've sourced wafer handling and chamber parts from HXC for two years. Cleanliness, dimensional accuracy, and batch consistency are excellent."
JT
James T.
Senior Procurement · USA
FAQ

Frequently Asked Questions About Vacuum Flange Fitting Machining

Engineering and procurement questions answered by our semiconductor components team.

HXC machines all standard vacuum interface flanges: CF ConFlat (DIN 28403 / PNEUROP, DN16 to DN500), KF (ISO 2861) (Ø10–160 mm), ISO-K / ISO-F (large-diameter), VCR face seal. All dimensions machined to standard and verified by CMM. Non-standard reducers, rotatable flanges, and custom adapters are also available.
Every vacuum flange fitting is helium mass spectrometer leak-tested before shipment: assembled against a reference blank flange with the appropriate gasket, pressurised with helium, and tested to <1×10⁻⁹ mbar·l/s. Test certificate included. CF flanges: <1×10⁻¹⁰ mbar·l/s available for UHV applications.
CF knife-edge is measured by contact profilometer at 4 angular positions: knife-edge angle (23° ± 0.5°), tip radius (≤ R0.1 mm), and height per DIN 28403. Any deviation from standard results in rejection. The profilometer report is included in the quality documentation.
Bore-to-flange face concentricity: ≤ 0.005 mm. Bore-to-bolt circle concentricity: ≤ 0.01 mm. HXC machines bore, flange face, and bolt circle in a single turning setup — ensuring all three are referenced to the same axis. Concentricity is verified by CMM.
Yes — custom adapters combining two different flange standards (e.g., KF40 to ISO-K160, CF35 to VCR, or non-standard ports) are routinely machined. Provide both mating flange standards and we design and quote the adapter geometry. DFM review confirms wall thickness and sealing face compatibility.
SUS316L: standard for HV and UHV — low outgassing, bakeable to 300°C, electropolishable. Use for CF and systems requiring base pressure below 10⁻⁷ mbar. Al 6061 hard anodized: for medium vacuum (< 10⁻⁵ mbar), lower weight, KF flanges only. Not bakeable above 150°C. Material selection depends on your target base pressure and operating temperature.
Yes — all vacuum flange fittings are ultrasonically cleaned in IPA, blown dry with filtered nitrogen, and double-sealed in ISO Class 5 cleanroom bags. Particle count report (ISO 14644 standard) is available on request for semiconductor-grade fittings. Custom packaging for direct cleanroom transfer is supported.
Prototype: 6–9 days. Batch: 10–16 days. Custom adapters: 7–12 days.
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Every enquiry includes a DFM review — tolerance feasibility, material confirmation, and process approach confirmed before production starts. MOQ 1 piece.

24hr
Quote Response
MOQ 1
Prototypes OK
ISO
9001:2015
📐
DFM Review on Every Enquiry
Tolerance feasibility, fixturing strategy, and material confirmation. Specific, actionable feedback — not generic pushback.
🎯
First Article Inspection — Standard
FAI report on every new run. Material certs and surface treatment certs included with every shipment.
🔄
Same Process: Prototype to Production
Process plan from your prototype applies to production batches. No re-qualification when you scale.
⚙
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