Product Category
Semiconductor · ISO Class 5 · CVD/ALD/Etch
HCS / 001 — 006
High-Cleanliness
Structural Parts
Ultra-clean CNC machined structural parts for semiconductor equipment — burr-free, Ra 0.8 µm or better, particle count ≤ ISO Class 5 after cleaning. Al 6061 hard-anodized or SUS316L electropolished. For support brackets, alignment structures, and mounting components inside process equipment.
ISO Cl.5
Cleanliness
Ra 0.4µm
EP Finish
N₂ Purge
Packaging
PROC FLOW · HCS-000 SUPPORT BRACKET · Al 6061
ISO 9001 · ISO 14644-1 CL.5
Hard Anodize Type III
UV Lamp Inspect
N₂ Bag · Sealed
Bracket · Mount · Frame · Shield
Part Types
Al 6061 · Al 7075 · SUS316L · SUS304
Materials
48hr Quote · 6-Day Proto
Service
ISO Class 5
Particle Cleanliness
after cleaning
after cleaning
Burr-Free
All Edges
10× magnification verified
10× magnification verified
Ra 0.8µm
Surface Finish
cleanroom grade
cleanroom grade
6 Days
Fastest Delivery
prototype orders
prototype orders
Machining Challenges
High-Cleanliness Structural Part Challenges
High-cleanliness structural parts are not merely clean machined parts — they require a controlled post-machining process to eliminate every source of particle generation before entering the cleanroom.
✂️
Comprehensive Deburring
Every edge, hole, pocket corner, and cross-feature must be deburred with controlled tooling — not by hand.
HXC uses precision rotary deburring tools, orbital deburring, and CO₂ snow cleaning for
internal features. 10× magnification inspection of all edges.
🧼
Validated Cleaning Process
Ultrasonic IPA cleaning removes cutting fluid and machining residue. HXC validates cleaning effectiveness
by UV lamp inspection and particle count — particle count certificate available. Process records
traceable to each batch.
📦
Cleanroom-Compatible Packaging
High-cleanliness parts must be packaged to maintain cleanliness during transit. HXC uses ISO Class 5
cleanroom bags with N₂ purge, double-sealed and labelled with batch number and cleaning date.
Our Work
Request Similar Part →
High-Cleanliness Structural Parts We've Made
Real CNC machined semiconductor components — cleaned, inspected, and cleanroom-packaged.
Capabilities & Tolerances
What We Can Deliver
Typical specifications — confirm exact requirements at enquiry.
| Particle cleanliness | ISO Class 5 equivalent after cleaning |
| Deburring | Precision tools + CO₂ snow, 10× inspect |
| Surface finish | Ra 0.8 µm (Al anodized), Ra 0.4 µm (SUS EP) |
| Packaging | ISO Class 5 bag, N₂ purge, double-sealed |
| Batch traceability | Batch number + cleaning date on every part |
| Certifications | Particle count + CMM dimensional report |
| Materials | Al 6061 / 7075, SUS316L, SUS304 |
| Surface treatment | Hard anodize, electropolish, passivation |
| Cleaning | IPA ultrasonic + UV inspect + particle count |
| Lead time (proto) | 6 – 9 days |
| Lead time (batch) | 10 – 16 days |
| Documentation | Cleaning cert + CMM + CoC |
How It Works
From Drawing to Cleanroom-Ready Part
Upload your drawing — DFM review, machining, cleaning, inspection, and cleanroom packaging within agreed lead time.
01
Upload Drawing
STEP, DXF, PDF. Include material, tolerance, and cleanliness class.
02
DFM & Quote
Free DFM review — sealing face feasibility, thin walls, deburring strategy. Quote in 48 h.
03
Machine, Clean & Inspect
CNC machining, ultrasonic clean, CMM inspection, cleanroom packaging.
04
Ship Worldwide
Full dimensional report + cleaning record enclosed. DHL / FedEx / sea freight.
Reviews
Trusted by Semiconductor Equipment Engineers
★★★★★
"Surface cleanliness and packaging met our cleanroom incoming inspection requirements immediately. Dimensional report matched our CMM check perfectly."
LW
Li Wei
Process Equipment Engineer · Taiwan
★★★★★
"HXC understood the vacuum sealing requirements for our chamber components without lengthy explanation. Lead time was exactly as quoted."
SL
Sophie L.
Equipment Design Engineer · South Korea
★★★★★
"We've sourced wafer handling and chamber parts from HXC for two years. Cleanliness, dimensional accuracy, and batch consistency are excellent."
JT
James T.
Senior Procurement · USA
FAQ
Frequently Asked Questions About High-Cleanliness Structural Part Machining
Engineering and procurement questions answered by our semiconductor components team.
Five-stage cleanliness control: (1) Precision deburring of all features;
(2) CO₂ snow cleaning of internal channels; (3) Ultrasonic IPA cleaning;
(4) N₂ blow-dry and UV lamp inspection (zero detectable particles or contamination);
(5) ISO Class 5 cleanroom packaging with N₂ purge. Particle count certificate (IPA
rinse + particle counter measurement) available.
Parts are placed in an ISO Class 5 equivalent cleanroom bag with N₂ purge,
double-sealed, labelled with part number, batch number, material, surface treatment, and cleaning date.
Outer packaging is a rigid anti-static box. For very sensitive parts: individual clear bags inside a
master bag. Packaging format can be customised for your incoming inspection procedure.
Al 6061 hard anodized (Type III): most common — HV 400+ surface resists particle
generation, non-reactive with most process gases, anodize is chemically inert.
SUS316L electropolished: for components in process gas contact or vacuum — low
outgassing, smooth surface reduces particle adhesion. PEEK: for chemical-resistant and
metal-contamination-sensitive applications.
Al 6061 hard anodized: Ra 0.8 µm on machined surfaces, Ra ≤ 0.4 µm after anodizing
(anodize smooths the surface). SUS316L electropolished: Ra 0.4 µm after electropolish.
Bare machined: Ra 0.8 µm minimum. Finish is measured by profilometer on representative
surfaces and reported.
Yes — standard documentation package: (1) CMM dimensional report;
(2) Material mill certificate; (3) Surface treatment process record;
(4) Cleaning record with batch date; (5) Particle count certificate
(on request); (6) Certificate of Conformance (CoC). All documents are batch-coded and
traceable to the specific production run.
Yes — parts cleaned to ISO Class 5 are shipped in double-sealed N₂-purged cleanroom bags inside rigid
packaging. For international shipment: the N₂ purge maintains inert gas atmosphere inside the bag for
the duration of transit. HXC recommends customers open parts in ISO Class 5 or cleaner immediately
before use.
Prototype: 6 – 9 days. Batch: 10 – 16 days. Parts requiring particle count
certificates: add 1 day.
Get a Quote
Send Your Drawing.
Get a Quote.
Every enquiry includes a DFM review — tolerance feasibility, material confirmation, and process approach confirmed before production starts. MOQ 1 piece.
24hr
Quote Response
MOQ 1
Prototypes OK
ISO
9001:2015
📐
DFM Review on Every Enquiry
Tolerance feasibility, fixturing strategy, and material confirmation. Specific, actionable feedback — not generic pushback.
🎯
First Article Inspection — Standard
FAI report on every new run. Material certs and surface treatment certs included with every shipment.
🔄
Same Process: Prototype to Production
Process plan from your prototype applies to production batches. No re-qualification when you scale.
⚙
3 / 4 / 5-Axis CNC + Turning
Complex structural parts, shafts, housings, and transmission components. Metals and engineering plastics.
ISO 9001:2015
3/4/5-Axis Milling
CNC Turning
CMM Inspection
Global Delivery
Get a Quote
Send Your Drawing.
Get a Quote.
Every enquiry includes a DFM review — tolerance feasibility, material confirmation, and process approach confirmed before production starts. MOQ 1 piece.
24hr
Quote Response
MOQ 1
Prototypes OK
ISO
9001:2015
📐
DFM Review on Every Enquiry
Tolerance feasibility, fixturing strategy, and material confirmation. Specific, actionable feedback — not generic pushback.
🎯
First Article Inspection — Standard
FAI report on every new run. Material certs and surface treatment certs included with every shipment.
🔄
Same Process: Prototype to Production
Process plan from your prototype applies to production batches. No re-qualification when you scale.
⚙
3 / 4 / 5-Axis CNC + Turning
Complex structural parts, shafts, housings, and transmission components. Metals and engineering plastics.
ISO 9001:2015
3/4/5-Axis Milling
CNC Turning
CMM Inspection
Global Delivery